Offered equipment - vacuum pumps

BOC EDWARDS EPX-180LE (EPX180L) HiVac dry pump

category : as-is or refurbished
status      : available
price        : EUR 2.500,= each (AS-IS, DOA warranty, EXWORKS NL, excl. VAT)
                  EUR 8.900,= each (fully refurbished with limited warranty, EXWORKS NL, excl. VAT)

We offer a functional Edwards EPX180LE (EPX180L) HiVac dry pump from stock.
Model code: A419-43-014. 400V, 50/60Hz.

This pump is fully functional but a bit noisy. It has been used for pumping down a vacuum chamber used for a clean straight forward e-beam proces only. We offer the pump as-is with DOA warranty or we can offer additional full refurbishment service with 6 months limited warranty.

Description
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-5 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated.

Features and Benefits

Compact Footprint – Smallest in the industry.
Low Cost of Ownership – Only 1.4 kW of power.
Unique Patent Protected Pumping Mechanism – Pump down at atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures.
Ultra Clean Mechanism – No grease or oil lubricated bearings exposed to high vacuum that allows no other source of potential contamination.
Extremely Reliable – Has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
Network Compatible – Available with End User Control and can be connected to a fab-wide network for diagnostic monitoring and control.
TIM (Tool Interface Module) This pump currently has no optional TIM, but this is available at additional cost.

download Edwards EPX180L(E) HiVac Dry Pump manual for detailed information.



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			Offered equipment - vacuum pumps BOC EDWARDS EPX-180LE (EPX180L) HiVac dry pump category : as-is or refurbished status : available price : EUR 2.500,= each (AS-IS, DOA warranty, EXWORKS NL, excl. VAT) EUR 8.900,= each (fully refurbished with limited warranty, EXWORKS NL, excl. VAT) We offer a functional Edwards EPX180LE (EPX180L) HiVac dry pump from stock. Model code: A419-43-014. 400V, 50/60Hz. This pump is fully functional but a bit noisy. It has been used for pumping down a vacuum chamber used for a clean straight forward e-beam proces only. We offer the pump as-is with DOA warranty or we can offer additional full refurbishment service with 6 months limited warranty. Description The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-5 Torr. These are truely amazing pumps; the Edwards EPX pump can pump down from atmosphere to the turbomolecular pressure range and can operate continuously at all inlet pressures. Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring. The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated. Features and Benefits Compact Footprint – Smallest in the industry. Low Cost of Ownership – Only 1.4 kW of power. Unique Patent Protected Pumping Mechanism – Pump down at atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. Ultra Clean Mechanism – No grease or oil lubricated bearings exposed to high vacuum that allows no other source of potential contamination. Extremely Reliable – Has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump. Network Compatible – Available with End User Control and can be connected to a fab-wide network for diagnostic monitoring and control. TIM (Tool Interface Module) This pump currently has no optional TIM, but this is available at additional cost. download Edwards EPX180L(E) HiVac Dry Pump manual for detailed information.

			P.O. Box 639, 5550 AP Valkenswaard, Netherlands \| phone +31 (0)40 20 469 31 \| fax +31 (0)40 20 139 81 \| info@fergutec.com