Offered equipment - evaporation systems
BALZERS BAK600 / BAK640 / BAK760 evaporation system
new-built or retrofit custom special
available
System basis is a completely updated Balzers 600, 640 or 760 evaporation system (different chamber size). The evaporation system can be optimized according to your wishes and can be equipped with:
- one or more thermal evaporators, one or more electron-beam evaporators equipped with a single or multi pocket crucibles or a combination of both evaporator types
- multi gas inlet system (for plasma cleaning and reactive evaporation)
- plasma cleaning device
- ion source (several types available) for ion-assisted evaporation
- special custom made substrate carrier for your products
- substrate preheating
- quartz crystal film thickness and rate measuring system or/and an optical thickness measuring system
- PLC machine controller with an industrial PC based human machine interface according to your wishes
- Operating voltage on request: 208-380-400VAC, 50/60 Hz.
The vacuum pump system will be optimized according to your wishes:
- rotary vane pump / booster pump and oil diffusion pump with a LN2 or Polycold cooled baffle
- oil-free prevacuum pump and cryo pump
- Polycold cooled Meisner trap built in into the vacuum chamber
The evaporation system is completely retrofitted and will be equipped with vacuum pumps and vacuum measuring equipment according to your wishes or company standardisation.
Please contact us for your optimal configuration...
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