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    home offered equipment sputtering systems BALZERS BAK-600 / BAK-640 / BAK-760

Offered equipment - sputtering systems

BALZERS BAK600 / BAK640 / BAK760 sputtering system

category : new-built or retrofit custom special
status      : available

System basis is a completely updated Balzers 600, 640 or 760 sputtering system (different chamber size). The sputtering system can be optimized according to your wishes and can be equipped with:

  • several magnetron sputtering cathodes options
  • one or more RF sputtering power supply with integrated matching.
  • one or more DC sputtering power supply
  • substrate table with water cooling.
  • substrate table with RF-bias/RF-etching.
  • multi gas inlet system.
  • Baratron process vacuum measuring equipment
  • oil based prevacuum pumps or dry prevacuum pumps
  • oil diffusion, turbo pump and/or cryo high vacuum pump combinations possible
  • LN2 baffle, Polycold or Meisner trap
  • operating voltage on request: 208-380-400VAC, 50/60 Hz.

The sputtering system can be equipped with vacuum pumps and vacuum measuring equipment according to your wishes or company standardisation.

   Please contact us for your optimal configuration...

P.O. Box 639, 5550 AP Valkenswaard, Netherlands | phone +31 (0)40 20 469 31 | fax +31 (0)40 20 139 81 | info@fergutec.com