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Offered equipment - sputtering systems

BALZERS BAK600 sputtering system

category : pre-owned system
status      : sold

System has the following specifications:

  • vintage: 1986
  • Hüttinger 2.5 kW RF generator
  • 1 kW DC power supply
  • gas inlet system for oxygen and argon
  • Leybold Trivac D65BCS (with PFPE oil) prevacuum pump
  • Leybold WSU251 rootsblower(with PFPE oil)
  • LN2 baffle
  • Balzers oil diffusion pump

Fergutec can completely retrofit the BAK600. It will be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and PLC controller according to your wishes or company standardisation.

 

   Please contact us for more detailed information...