Offered equipment - sputtering systems
LEYBOLD / BALZERS PROCESS SYSTEMS (BPS) EMERALD / ZH620 / CORONA / VANGUARD sputtering system
pre-owned system
sold
Leybold / Balzers Process Systems (BPS) automatic ZH 620 / Corona / Emerald / Vanguard cathode sputtering system equipped with:
- automatic operated robot system with cassette load lock
- two PK250 magnetron sputtering cathodes (diameter 250 mm)
- integrated lift for raising the top flange (including the sputtering cathodes) of the process chamber
- Hüttinger 5 kW RF sputtering power supply with integrated matching unit.
- Advanced Energy 6 kW DC sputtering power supply.
- substrate table with water cooling.
- substrate table with RF-bias/RF-etching.
- multi gas inlet system.
- MKS Baratron process vacuum measuring equipment
- OMS 3000 in-situ optical film thickness measurement
- Leybold Trivac D16B prevacuum pump with Leybold Turbovac 361 turbomolecular pump
for evacuating the robot system chamber and cassette load lock
- Leybold Trivac D65BCS PFPE / WSU 251 prevacuum/Roots pumpsytem with Leybold Turbovac 1000 turbomolecular pump equipped with LN2 baffle for evacuating the process chamber
- fully computer controlled (PLC with PC)
- optimized for clean room wall installation
- 380/400 VAC, 3 phase, 50 Hz
Fergutec can completely retrofit the system. It will be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and PLC controller according to your wishes or company standardisation.
Please contact us for more detailed information...
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