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offered equipment

      sputtering systems
       evaporation systems
       etching systems
       vacuum pumps/controllers
       vacuum measurement
       residual gas analysis - RGA
       miscellaneous

 



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Offered equipment - miscellaneous

SPARE PARTS LEYBOLD sputter-, evaporation systems and etchers

category : pre-owned or new
status      : available
price        : on request

Fergutec offers new and pre-owned spare parts for the below listed Leybold sputtering systems, evaporators and etching systems.

  • A-700
  • A-704
  • A-714
  • A-724
  • A-900
  • A-902
  • A-924
  • APS-904
  • APS-1104
  • A-1100
  • A-1104
  • A-1500
  • A-1504
  • Z-401
  • LE-301
  • Z-400
  • Z-550
  • Z-590
  • Z-600
  • Z-650
  • Z-660
  • Z-750
  • Z-700
  • Z-1100
  • ZV-350
  • ZV-6000
  • ZV-1200
  • L-400
  • L-560
  • ZH-620 Corona / Emerald / Vanguard
  • A-400
  • Topaz
  • Circulus

We offer new or pre-owned backing plates with teflon isolators (PK-75, PK-150, PK-200, PK-250, PK-500, PK-550, PK-750 etc.) cathodes, electrodes, DC power supplies, RF generators, sputter and evaporation sources, gauges, vacuum measurement systems, layer thickness measurement systems, substrate heater, teflon isolators, vacuum pumps, control units, PLC systems, etc.

Please send us your inquiry.