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    home offered equipment sputtering systems LEYBOLD Z400

Offered equipment - sputtering systems

LEYBOLD Z400 laboratory sputtering system

category : pre-owned
status      : 1x system sold, 1x system available

Leybold Z-400 sputtering system equipped with:

  • cabinet with vacuum pump controller, Leybold TM 210 and PM 410 S vacuum measuring equipment
  • vacuum process chamber consists of the base plate, the camber lid and a “mushroom” shaped rotating device. This device holds the sputtering sources (sputtering down)
  • three new PK 75 magnetron sputtering cathodes (diameter 75 mm) without targets.
  • 600 watt RF sputtering power supply (Freischwinger) with voltage, current, DC-potential and DC-bias indication.
  • new 2 kW ADL DC sputtering power supply.
  • gas inlet system with two needle valves.
  • vacuum pumping system with overhauled Leybold Trivac D16 A prevacuum pump and overhauled Leybold Turbovac 450 turbomolecular pump
  • 380/400 VAC, 3 phase, 50 Hz

Fergutec can completely retrofit the Z400. It will be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and PLC controller according to your wishes or company standardisation.

 

   Please contact us for more detailed information...

P.O. Box 639, 5550 AP Valkenswaard, Netherlands | phone +31 (0)40 20 469 31 | fax +31 (0)40 20 139 81 | info@fergutec.com