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Offered equipment - sputtering systems
LEYBOLD Z550 sputtering system
pre-owned system
available
Leybold semi-automatic Z550 cathode sputtering system equipped with:
- four new PK150 magnetron sputtering cathodes (diameter 150 mm)
- one of the sputtering cathodes can be replace by a heating device or RF etching device
- Hüttinger 2,5 kW RF sputtering power supply, type IS 2,5/13560S, with integrated matching unit
- substrate table with water cooling and with RF-bias/RF-etching.
- gas inlet system.
- special flange to increase the high of the vacuum chamber so sputtering of higher substrates is possible
- Edwards E2M40 prevacuum pump with Leybold cryo pump
- Balzers QMG 064 RGA
- operating voltage: 380/400 VAC, 50 Hz.
Fergutec can completely retrofit the Z550. It will be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and PLC controller according to your wishes or company standardisation.
 Please contact us for more detailed information...
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