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    home offered equipment sputtering systems LEYBOLD Z550

Offered equipment - sputtering systems

LEYBOLD Z550 sputtering system

category : pre-owned system
status      : available

Leybold semi-automatic Z550 cathode sputtering system equipped with:

  • four new PK150 magnetron sputtering cathodes (diameter 150 mm)
  • one of the sputtering cathodes can be replace by a heating device or RF etching device
  • Hüttinger 2,5 kW RF sputtering power supply, type IS 2,5/13560S, with integrated matching unit
  • substrate table with water cooling and with RF-bias/RF-etching.
  • gas inlet system.
  • special flange to increase the high of the vacuum chamber so sputtering of higher substrates is possible
  • Edwards E2M40 prevacuum pump with Leybold cryo pump
  • Balzers QMG 064 RGA
  • operating voltage: 380/400 VAC, 50 Hz.
Fergutec can completely retrofit the Z550. It will be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and PLC controller according to your wishes or company standardisation.


   Please contact us for more detailed information...

P.O. Box 639, 5550 AP Valkenswaard, Netherlands | phone +31 (0)40 20 469 31 | fax +31 (0)40 20 139 81 | info@fergutec.com