Offered equipment - sputtering systems

LEYBOLD Z650 sputtering system

category : pre-owned system
status : available

Leybold Z650 sputtering system equipped with:

load lock / exit chamber with:

Leybold Trivac D65B prevacuum pump
Leybold Turbovac 1000 turbo molecular pump
RF plasma cleaning

process chamber A with:

Alcatel 2063 prevacuum pump and Pfeiffer TMH1001P turbodrag pump (TMH is as good as new)
3 x new PK 200 sputtering cathodes positions
RF and DC sputtering power supply
(combined with process chamber B)
Balzers QMG064 mass spectrometer

process chamber B with:

Leybold Trivac D65B prevacuum pump
Leybold Turbovac 1000 turbo molecular pump
2 x new PK 200 sputtering cathodes positions
1x substrate heating position
RF and DC sputtering power supply
(combined with process chamber A)
RF bias
Balzers QMG064 mass spectrometer

Operating voltage : 380/400 VAC, 50 Hz.

Fergutec can completely retrofit the Z650. It can be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and PLC controller corresponding to your wishes or company standardisation.

Please contact us for more detailed information...



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			Offered equipment - sputtering systems LEYBOLD Z650 sputtering system category : pre-owned system status : available Leybold Z650 sputtering system equipped with: load lock / exit chamber with: Leybold Trivac D65B prevacuum pump Leybold Turbovac 1000 turbo molecular pump RF plasma cleaning process chamber A with: Alcatel 2063 prevacuum pump and Pfeiffer TMH1001P turbodrag pump (TMH is as good as new) 3 x new PK 200 sputtering cathodes positions RF and DC sputtering power supply (combined with process chamber B) Balzers QMG064 mass spectrometer process chamber B with: Leybold Trivac D65B prevacuum pump Leybold Turbovac 1000 turbo molecular pump 2 x new PK 200 sputtering cathodes positions 1x substrate heating position RF and DC sputtering power supply (combined with process chamber A) RF bias Balzers QMG064 mass spectrometer Operating voltage : 380/400 VAC, 50 Hz. Fergutec can completely retrofit the Z650. It can be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and PLC controller corresponding to your wishes or company standardisation. Please contact us for more detailed information...

			P.O. Box 639, 5550 AP Valkenswaard, Netherlands \| phone +31 (0)40 20 469 31 \| fax +31 (0)40 20 139 81 \| info@fergutec.com