Offered equipment - sputtering systems

category : pre-owned system
status      : available

We offer an automatic Z-700 cathode sputtering system for decorative / hard coatings. This system is generally refurbished and cleaned. System is equipped with:

• vacuum chamber dimensions: diameter 700 x 700 mm.
• two new PK500 magnetron sputtering cathodes bolt-on version, target dimensions 488 x 48 x 6 mm, built into the chamber wall.
  Useful coating height is 400 mm.
• two central mounted new PK500 magnetron sputtering cathodes are optional.
• Substrate carrier with shutter. Substrat carrier diameter 560 mm. Useful substrate loading area is approximety 1,500 x 400 mm.
• RF sputtering power supply with integrated matching unit and RF-switch.
• RF-etching optional.
• multi gas inlet system.
• MKS Baratron process vacuum measuring equipment.
• prevacuum pump(s) combination with turbomolecular pump(s).
• oil-free and/or cryopumps are optional.
• heaters are optional.
• PC and PLC controlled with automatic-, step- and test mode.

Fergutec can completely retrofit the Z700. It can be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and modern PLC controller according to your wishes or company standardisation.

   Please contact us for more detailed information...

For a system impression, please also see the original Z700 leaflets in German and English language:

 download Leybold Z700 brochure part 1 of 3
 download Leybold Z700 brochure part 2 of 3
 download Leybold Z700 brochure part 3 of 3