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    home offered equipment etching systems LEYBOLD Z401S

Offered equipment - etching systems

LEYBOLD Z401-S RIE/Plasma etching system

category : pre-owned system
status      : available

Leybold Z401 S RIE/Plasma etcher in superb condition!
Equipped with:

  • stainless steel high vacuum process chamber with open/turnable chamber lid (chamber dimensions; 350x285mm)
  • load lock chamber, suitable for substrates with max. size 8"
  • water cooled lower 200mm electrode (also heatable) with gas shower
  • water cooled upper 250mm electrode (also heatable) with gas shower
  • distance between lower and upper electrode is adjustable by hand (10-80mm)
  • vacuum pumping system with Leybold Trivac D40BCS prevacuum pump and Turbovac 450 TMP high vacuum pump + NT450 controller
  • 1x RF etching power supply ENI ; max.power 650W incl. auto matching unit
  • process gas supply system with 3x mass flow controller
  • high vacuum measuring: Leybold Penningvac and MKS Baratron
  • prevacuum measuring: Leybold Thermovac TR201
  • automated system; Kuhnke PLC and PC controlled

 

Fergutec can completely retrofit the system. It will be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies, new PLC controller and software according to your wishes or company standardisation.

   Please contact us for more detailed information...

P.O. Box 639, 5550 AP Valkenswaard, Netherlands | phone +31 (0)40 20 469 31 | fax +31 (0)40 20 139 81 | info@fergutec.com