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    home offered equipment sputtering systems LEYBOLD BPS ZH620

Offered equipment - sputtering systems

LEYBOLD/BPS/Unaxis ZH620 CORONA-VANGUARD-EMERALD sputtering system

category : new built or retrofit custom special
status      : available

automatic ZH620 cathode sputtering system can be equipped with:

  • automatic operated (cassette) load lock (robot handler)
  • two - six magnetron sputtering cathodes (diameter 150-250 mm)
  • 2,5 kW RF sputtering power supply with integrated matching unit.
  • 5 kW DC sputtering power supply
  • substrate table with water cooling.
  • substrate table with RF-bias/RF-etching.
  • multi gas inlet system.
  • Baratron process vacuum measuring equipment
  • oil based prevacuum pumps or dry prevacuum pumps
  • turbopump and/or cryo high vacuum pump combinations possible
  • operating voltage on request: 208-380-400VAC, 50/60 Hz.

It can be equipped with vacuum pumps, vacuum measuring equipment, DC/RF power supplies and PLC controller according to your wishes or company standardisation.

   Please contact us for more detailed information...

P.O. Box 639, 5550 AP Valkenswaard, Netherlands | phone +31 (0)40 20 469 31 | fax +31 (0)40 20 139 81 | info@fergutec.com