Offered equipment - sputtering systems

category : new built or retrofit custom special
status      : available

System basis are completely updated modules of the Leybold ZV6000 cathode sputtering system. This is an automatic vertical sputtering system which will be optimized according to your wishes and can be equipped with:

• combined load-lock / exit module (single ended configuration)
• separated load-lock and exit module with carrier return (inline configuration)
• heating or plasma cleaning module
• one or several process modules. the process modules are separated with valves.
• 1 - 2 x 3 pieces PK 500 (488 x 87,5mm) diode and/or magnetron sputtering cathodes per process module.
• single or multi sputtering gas inlet system (for reactive sputtering).
• quartz crystal film thickness measurement system
• vertical substrate carrier for substrate dimensions till 450 x 450 mm at both sides.
• carrier transport system in bottom of the process chamber
• PLC machine controller with an industrial PC based human machine interface, according to your wishes
• operating voltage on request (208-380-400 VAC, 50/60 Hz.)

The sputtering system is completely retrofitted and will be equipped with vacuum pumps and vacuum measuring equipment corresponding to your wishes or company standardisation.