Offered equipment - sputtering systems

MINILAB R&D/Pilot Line Box Coater

category : new built custom special
status : available

The MiniLab is a true multi-technique box coater suitable for R&D and small pilot line production purposes. The most flexible and cost-effective coating system ever seen in the market; featuring:

chamber heating and cooling options
e-beam, sputter and thermal source options
layer thickness measurement options
sample rotation kit options (incl. z-shift, heating & cooling options)
plasma cleaning/etching options
fast entry load lock option
large substrate capacity
manual or automated process control options

Vacuum pumping system will be optimized according to your wishes:

rotary vane pump with turbomolecular pump
(optional with a LN2 cooling trap or water pump)
oil-free prevacuum pump with turbodrag pump
(optional with a LN2 cooling trap or water pump)
oil-free prevacuum pump with cryo pump

download brochure for more information

Please contact us for more detailed information...



	home system retrofit offered equipment sputtering systems evaporation systems etching systems vacuum pumps/controllers vacuum measurement residual gas analysis - RGA miscellaneous our company contact us your request sitemap		home offered equipment sputtering systems MiniLab R&D Box Coater

			Offered equipment - sputtering systems MINILAB R&D/Pilot Line Box Coater category : new built custom special status : available The MiniLab is a true multi-technique box coater suitable for R&D and small pilot line production purposes. The most flexible and cost-effective coating system ever seen in the market; featuring: chamber heating and cooling options e-beam, sputter and thermal source options layer thickness measurement options sample rotation kit options (incl. z-shift, heating & cooling options) plasma cleaning/etching options fast entry load lock option large substrate capacity manual or automated process control options Vacuum pumping system will be optimized according to your wishes: rotary vane pump with turbomolecular pump (optional with a LN2 cooling trap or water pump) oil-free prevacuum pump with turbodrag pump (optional with a LN2 cooling trap or water pump) oil-free prevacuum pump with cryo pump download brochure for more information Please contact us for more detailed information...

			P.O. Box 639, 5550 AP Valkenswaard, Netherlands \| phone +31 (0)40 20 469 31 \| fax +31 (0)40 20 139 81 \| info@fergutec.com