Offered equipment - etching systems

MINILAB R&D/Pilot Line etching system

category : new built custom special
status : available

The MiniLab is a true multi-technique box coater suitable for R&D and small pilot line production purposes. The most flexible and cost-effective coating system ever seen in the market; featuring:

chamber heating and cooling options
e-beam, sputter and thermal source options
layer thickness measurement options
sample rotation kit options (incl. z-shift, heating & cooling options)
plasma cleaning/etching options
fast entry load lock option
large substrate capacity
manual or automated process control options

Vacuum pumping system will be optimized according to your wishes:

rotary vane pump with turbomolecular pump
(optional with a LN2 cooling trap or water pump)
oil-free prevacuum pump with turbodrag pump
(optional with a LN2 cooling trap or water pump)
oil-free prevacuum pump with cryo pump

download brochure for more information

Please contact us for more detailed information...



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			Offered equipment - etching systems MINILAB R&D/Pilot Line etching system category : new built custom special status : available The MiniLab is a true multi-technique box coater suitable for R&D and small pilot line production purposes. The most flexible and cost-effective coating system ever seen in the market; featuring: chamber heating and cooling options e-beam, sputter and thermal source options layer thickness measurement options sample rotation kit options (incl. z-shift, heating & cooling options) plasma cleaning/etching options fast entry load lock option large substrate capacity manual or automated process control options Vacuum pumping system will be optimized according to your wishes: rotary vane pump with turbomolecular pump (optional with a LN2 cooling trap or water pump) oil-free prevacuum pump with turbodrag pump (optional with a LN2 cooling trap or water pump) oil-free prevacuum pump with cryo pump download brochure for more information Please contact us for more detailed information...

			P.O. Box 639, 5550 AP Valkenswaard, Netherlands \| phone +31 (0)40 20 469 31 \| fax +31 (0)40 20 139 81 \| info@fergutec.com