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ADL GS30 DC plasma power supply 3000W 3kW, 800V, 5.3A with air cooling with active control panel and AS4 interface
Dressler Stolberg Advanced Energy Cesar 1312 RF Generator 13,56 Mhz. HF power supply 1200W for deposition tools (2 kw) SN: 293614 PN: 64000002
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