Retrofit (refurbishment) of an existing Balzers BA-510 sputron sputtering system where we implemented the specific demands of the customer. All neccessary mechanical components were retrofitted and the vacuum pumping system was fully replaced by an oil-free pumping system with an Aquatrap baffle.

The old manual controls were replaced by a fully automatic control system, based on National Instruments Fieldpoint. The system is controlled by a 17" touch screen in combination with an industrial PC and a custom-made graphic user interface, based on Labview. All relevant process parameters are logged in a DDE compatible file. The system is equipped with a cold- and warm water circuit which takes care of the conditioning and cooling of the system.

Delivery of a new fully retrofitted (refurbished) Z-590 sputtering system with an automatic load robot. The system is almost completely built out of new components and is equipped with an oil-free pumping system, LN2 baffle and DC/RF-power supplies for sputter targets and bias-sputtering.

This system is equipped with a fully automatic control system, based on a Siemens PLC. The system is controlled via a desktop PC in combination with a 17” TFT display and a custom-made WinCC graphic user interface. All relevant process parameters are logged in a DDE compatible file. The sputtering system is equipped with a specially designed closed loop cold and warm water circuit, which is integrated in the machine control.

Delivery of a new fully retrofitted (refurbished) ZV-1200 vertical inline sputtering system; single ended or carrier return facility. The system is equipped with a heated load-lock chamber for the conditioning of the substrates. The system is suitable for both DC- and RF-sputtering. This sputtering system is equipped with a fully automatic control system, based on a Siemens PLC.
The system is controlled via a desktop PC in combination with a 17” TFT display and a custom-made WinCC graphic user interface. All relevant process parameters are logged in a DDE compatible file. The sputtering system is equipped with a specially designed closed loop cold and warm water circuit, which is integrated in the machine control.

Retrofit (refurbishment) of an old existing A-1100 evaporation system, of which the old controls could not possibly be serviced anymore, and were therefore replaced in full. The complete system was cleaned and fully refurbished. The cold- and warm water circuit was replaced. The steel chassis, the control cabinet and the front panels were painted in customer house style colors. The evaporation system is equipped with fully automated controls, based on a Siemens PLC. The optical measuring system and layer thickness measuring system are completely integrated in the machine controls. The system is controlled by a 17" touch screen in combination with an industrial PC and a custom-made graphic user interface, based on WinCC. All relevant process parameters are logged in a DDE compatible file.